The adhesion of the SiC films has been investigated

Fig. 3. FESEM surface morphologies of AN-2728 β-SiC films prepared with the H2/TMS flow ratios of (a) 40:5, (b) 80:5, (c) 120:5, (d) 160:5 and (e) 200:5.Figure optionsDownload full-size imageDownload high-quality image (733 K)Download as PowerPoint slide
3.2. Growth rate of the β-SiC films
Fig. 4. Cross-sectional FESEM morphologies of the β-SiC films prepared with the H2/TMS flow ratios of (a) 40:5, (b) 80:5, (c) 120:5, (d) 160:5 and (e) 200:5.Figure optionsDownload full-size imageDownload high-quality image (338 K)Download as PowerPoint slide
Fig. 5. Variation in the inversion growth rate of the β-SiC films with the increasing H2/TMS flow ratios.Figure optionsDownload full-size imageDownload high-quality image (52 K)Download as PowerPoint slide
3.3. Adhesion of the β-SiC films
Fig. 6. SEM micrographs of the scratches on the β-SiC layers prepared with the H2/TMS flow ratios of (a) 40:5, (b) 80:5, (c) 120:5, (d) 160:5 and (e) 200:5.Figure optionsDownload full-size imageDownload high-quality image (729 K)Download as PowerPoint slide