The X-ray photoelectron spectroscopy (XPS) has been used to estimate the relative strength of various s-p hybridization components of carbon in the material grown by the secondary MLN8237 under the mask. The high resolution XPS C1s spectrum for the NCD sample prepared at F(H2) = 30 sccm is shown in Fig. 14. Estimation on the relative strength of different components identifies a significant quantity of sp3 content ~ 84.77% in the material which is contributed not only by the NCD structures but also from a-C sp3 phases as well. The high sp3 content in the film appears to be nicely correlated to the FE-SEM and FEG-TEM observations of miniaturized NCD features.
Fig. 14. The high resolution XPS spectra for the optimized material grown by secondary plasma at F(H2) = 30 sccm, with the deconvolution into three bands marking the different bonding configurations of carbon.Figure optionsDownload full-size imageDownload high-quality image (193 K)Download as PowerPoint slide