For these reasons many efforts and projects

Fig. 12. AFM images of films formed at different deposition times and thus with different thicknesses: (a) 5 min – 15 nm, (b) 10 min – 30 nm, (c) 45 min – 135 nm, (d) 60 min – 180 nm, (e) 105 min – 315 nm and (f) 180 min – 540 nm. The Voreloxin conditions were 110 W power, Ar and O2 gas pressures of 0.67 Pa and 0.13 Pa, respectively, and position Z = 29 mm (deposition rate of 3 nm/min).Figure optionsDownload full-size imageDownload high-quality image (604 K)Download as PowerPoint slide
Fig. 13. Distribution of the particle diameters (grain) determined by AFM measurements of the (a) 5 min – 15 nm and 15 min – 45 nm films and of the (b) 30 min – 90 nm, 60 min – 180 nm and 90 min – 270 nm films. The plasma conditions were 110 W power, Ar and O2 gas pressures of 0.67 Pa and 0.13 Pa, respectively, and position Z = 29 mm (deposition rate of 3 nm/min).Figure optionsDownload full-size imageDownload high-quality image (280 K)Download as PowerPoint slide