The surface and cross-section morphologies of SiBN coating were observed using scanning SNS-314 microscopy (SEM, S-2700, Hitachi, Japan). In order to acquire average thickness and calculate deposition rates, ten different positions around cross-sectional edge were observed by SEM. The distributions of ten positions are uniform around cross-sectional edge.
Deposition rate was calculated through Eqs. (2) and (3):equation(2)Hav=(H1+H2+…+H10)/10Hav=H1+H2+…+H10/10equation(3)v=Hav/t.v=Hav/t.
In Eqs. (2) and (3), Hav refers to the average thickness of deposits, nm; Hi (i = 1, 2, 3…10) refers to the thicknesses of deposits at different areas on substrates, nm; v refers to the average deposition rate, nm/h; and t refers to the deposition time, h.
The phase composition was characterized by X-ray diffraction (XRD, X'Pert Pro, Philip). The chemical composition was examined with X-ray photoelectron spectroscopy (XPS, K-Alpha, Thermo Scientific). The microstructure was characterized by transmission electron microscope (TEM, Tecnai-F30, Hitachi, Japan, 300 eV). The chemical bonds of the products were evaluated by X-ray photoelectron spectroscopy (XPS, K-Alpha, Thermo Scientific) and attenuated total reflection infrared spectroscopy (ATR-IR, Vertex 70, Bruker).