ITO:Zr films; SF6/Ar plasma; rms roughness; Haze ratio; Modulated surface morphology; Amorphous silicon thin film solar cell
Fig. 1. Schematic diagram of various textured glass surface morphologies in a-Si thin film solar cells.Figure optionsDownload full-size imageDownload high-quality image (363 K)Download as PowerPoint slide
We report the SF6/Ar Darunavir textured periodic glass surface morphologies for high transmittance and haze ratio of ITO:Zr films for a-Si TFSCs. Various surface morphologies of textured glass and ITO:Zr films as a function of glass etching time are discussed. The optical transmittance and haze ratio of ITO:Zr films as a function of glass etching time is pharynx explained. The rms roughness, sheet resistance, and electrical characteristics of ITO:Zr films deposited on the textured glass surface morphologies are also discussed. Finally, the influence of textured glass surface morphologies on the performance of a-Si TFSCs is discussed.
2. Experimental details