Thus from our preliminary studies it appears that the ITO

1. Introduction
At present, although many researches related to mechanical properties of silicon materials have been reported [11], [12], [13] and [14], the depth profile of mechanical properties modified by ion-beam irradiation was rarely reported. In this paper, the mechanical properties were investigated on crystalline silicon (c-Si) samples irradiated by Kr-beam with an Wnt-C59 of 240 keV and fluence of 1 and 5 × 1014 ions/cm2, with which a lateral deformation was obviously observed in ref.