In many practical high accuracy positioning

The mentioned process is based on different etching rates of non-exposed and exposed micro-structured glass (Feindt, Harnisch, Zöppig, Hülsenberg, & Kallenbach, 1998). In our study we considered only a PEA’s complex nonlinear behavior which is B cells important for the positional control task without any additional positioning mechanisms. Normally a PEA’s supply voltage value has to be between the maximal voltage intervals, i.e.