Our work demonstrates that released wrinkled InGaAs

GI-XRD indicates that the deposited material undergoes a partial relaxation. Further experiments have to show, if sliding filament model relaxation is mostly elastic or plastic.
AcknowledgmentsS.O. Ferreira (Universidade de Viçosa) is acknowledged for his constant interest and help. We thank the microfabrication (LMF) (especially M.H. de Oliveira Piazzetta) for access to their facilities and for their support. The XRD of the sample was measured using the XRD2 beamline of the LNLS.